| 基于色散共焦原理的内径测量技术研究 |
| Inner diameter measurement based on dispersive confocal principle |
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| 中文摘要: |
| 为了满足小口径深孔类零件的高精度非接触测量需求，研制了一套适用于较大测量范围的高分辨力光学测量系统。利用色散共焦测量原理，建立了微位移量系统，结合光谱分析技术，形成了高分辨力光学测量系统。首先，基于色散共焦原理，设计了色散物镜结构；其次设计爬行结构，利用电机带动反射镜旋转，完成深管不同截面的径向几何尺寸测量；再次，通过最小二乘法以及误差分析与补偿，对系统误差进行分析；最后通过搭建实验平台验证。结果表明：该测量系统可实现小测量范围达到5 mm，测量误差优于3.3 μm，具有测量精度高、测量范围较大、结构紧凑等优点，对解决小尺寸深孔类零件内径测量难题具有重要实用意义。 |
| 英文摘要: |
| In order to meet the requirements of high-precision and non-contact measurement of small diameter deep hole parts, a set of high-precision optical measurement system suitable for large measurement range was developed. Based on the principle of dispersion confocal measurement, a micro displacement system is established, and a high-resolution optical measurement system is formed by combining the spectral analysis technology. Firstly, based on the dispersion confocal principle, the structure of dispersion objective lens is designed by using Zemax software. Secondly, the creeping structure is designed, and the motor is used to drive the reflector rotating to complete the radial geometric dimension measurements of different sections of the deep holes. Thirdly, the system error is analyzed by least square method and is compensated. Finally, an experimental platform was built to verify that the measurement range reached 5 mm and the measurement accuracy was better than 3.3 μm. It has the advantages of high measurement accuracy, large measurement range and compact structure, which is of great significance to solve the problem of the measurement of the inner diameter of small size deep hole parts. |
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| 中文关键词: 内径测量 非接触测量 色散共聚焦 测量系统 |
| 英文关键词:inner diameter measurement non-contact measurement dispersion confocal measurement system |
| 基金项目: |
| DOI：10.11823/j.issn.1674-5795.2023.01.12 |
| 引用本文：刘汉戈, 闫钰锋, 唐卫, 韩佳昊, 潘国涛.基于色散共焦原理的内径测量技术研究[J].计测技术,2023,(1):. |
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