| 大量程高性能光栅位移测量技术 |
| Large range and high performance grating displacement measurement technology |
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| 中文摘要: |
| 高精度光栅位移测量系统具有纳米级重复精度、环境适应性强、维度易于扩展等优点，可以满足精密制造行业对米级测量量程、亚微米级精度与多维测量能力融合的测量技术要求，在高端制造、精密仪器等领域有重要应用。通过对测量光栅的各项参数进行研究，提升了测量光栅的尺寸与制作精度；提出高精度锥面衍射光栅位移测量、高倍细分转向干涉光栅位移测量、“品”字形拼接大量程光栅位移测量等技术，实现了数百毫米测量量程亚微米级测量精度。从光栅制作到测量系统研制对提升精度、分辨力及量程提供了理论分析与技术验证。 |
| 英文摘要: |
| High-precision grating displacement measurement system has the advantages of nanometer repetition accuracy, strong environmental adaptability, and easy expansion of dimensions. It can meet the measurement requirements of the precision manufacturing industry for the integration of meter-level measurement range, submicron-level accuracy and multi-dimensional measurement capability. It has important applications in high-end manufacturing, precision instruments and other fields. By studying the parameters of the measuring grating, the size and manufacturing accuracy of the measuring grating are improved. High-precision conical diffraction grating displacement measurement, high power subdividing steering interferometric grating displacement measurement, 品-shaped splicing large range grating displacement measurement and other technologies are proposed to achieve sub-micron measurement accuracy in hundreds of millimeter measurement range. From grating fabrication to measurement system development, theoretical analysis and technical verification are provided for improving measurement accuracy, resolution and range. |
| 作者 | 单位 | | 刘林, 刘兆武, 于宏柱, 王玮, 姜岩秀, 姜珊, 孙宇佳, 金思宇, 梁旭, 巴音贺希格, 李文昊 | 中国科学院长春光学精密机械与物理研究所，吉林 长春 130033 |
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| 中文关键词: 光栅位移测量 锥面衍射 转向干涉 大量程拼接 |
| 英文关键词:gating displacement measurement conical diffraction steering interference large range splicing |
| 基金项目: |
| DOI：10.11823/j.issn.1674-5795.2023.01.07 |
| 引用本文：刘林, 刘兆武, 于宏柱, 王玮, 姜岩秀, 姜珊, 孙宇佳, 金思宇, 梁旭, 巴音贺希格, 李文昊.大量程高性能光栅位移测量技术[J].计测技术,2023,(1):. |
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